[1]董少光,庄君活,曾亚光.在 SiO2 衬底上生长多晶 Ge 薄膜的结晶机制研究[J].佛山科学技术学院学报(自然科学版),2019,(06):011-17.
 DONG Shao-guang,ZHUANG Jun-huo,ZENG Ya-guang.The crystallization mechanisms of poly-crystalline Ge thin films grown on SiO2 substrate[J].JOURNAL OF FOSHAN UNIVERSITY NATUAL SCIENCE EDITION,2019,(06):011-17.
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在 SiO2 衬底上生长多晶 Ge 薄膜的结晶机制研究
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《佛山科学技术学院学报》(自然科学版)[ISSN:1006-6977/CN:61-1281/TN]

卷:
期数:
2019年06期
页码:
011-17
栏目:
数理科学
出版日期:
2019-11-30

文章信息/Info

Title:
The crystallization mechanisms of poly-crystalline Ge thin films grown on SiO2 substrate
文章编号:
1008-0171(2019)06-0011-07
作者:
董少光庄君活曾亚光
佛山科学技术学院 物理与光电工程学院
Author(s):
DONG Shao-guang ZHUANG Jun-huo ZENG Ya-guang
School of Physics and Optoelectronic Engineering, Foshan University
关键词:
Al 诱导结晶多晶 Ge 薄膜非晶 Ge 薄膜层交换
Keywords:
Al induced crystallization poly-crystalline germanium amorphous germanium layer exchange
分类号:
O484
文献标志码:
A
摘要:
在低温条件下生长的多晶 Ge 薄膜在光伏器件和电子器件领域具有非常广泛的应用。在实验研究中,利用 Al 诱导结晶的生长方法在 200 ℃的低温条件下,在 SiO2 衬底上生长出结晶质量很好的多晶 Ge 薄膜。 实验中, 特意在 Al 薄膜和非晶 Ge 薄膜之间生长了一层很薄的 GeOx 扩散控制层。 研究发现,在 Al/a-Ge 双层薄膜样品 中,当 Al 薄膜与非晶 Ge 薄膜完成层交换后,生长出的多晶 Ge 薄膜的晶向得到了有效控制。 在非晶 Ge 薄膜转 变为多晶 Ge 薄膜的结晶过程中,通过进一步控制 Ge 晶颗粒的成核位置和密度以及二维生长的速率就可以制 备出微米量级大小的 Ge 晶颗粒和(111)晶向较好的多晶 Ge 薄膜。
Abstract:
The poly-crystalline Ge thin films grown under low temperature is of great application in photovoltaic devices and electronics applications. We have formed the poly-crystalline Ge thin films grown on SiO2 substrate by Al-induced crystallization under low temperatures at 200 ℃ in our experiments. A much thinner GeOx diffusion control interfacial layer, grown between Al thin films and the underlying a-Ge thin films intentionally, is found to achieve layer exchange while the crystal orientation of poly-crystalline Ge thin films had been controlled effectively within Al/a-Ge bilayer thin films. Poly-crystalline Ge thin films with micron-size grains and preferred (111)-orientation are prepared by the controlled c-Ge grain nucleation and planar growth velocity during the crystallization of a-Ge thin films transformed to c-Ge thin films.

参考文献/References:


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备注/Memo

备注/Memo:
收稿日期:2019-06-18 基金项目:国家自然科学基金资助项目(11474053) 作者简介:董少光(1970-),男,江西景德镇人,佛山科学技术学院讲师,博士。
更新日期/Last Update: 2020-01-11